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专利名称：Apparatus for plasma treatment and/or
coating of a work piece
发明人：TIETEMA, ROEL,DOERWALD, DAVE,GUBBELS,
ROGER J.H.,KALAND, ANTHONIE J.A.
申请号：EP05007933.4申请日：20050412公开号：EP1712655A1公开日：20061018
专利附图：
摘要：Device for plasma treatment and or coating of workpieces, including anevacuatable chamber (2) a rotatable workpiece holding device (3) the chamber, and a
plasma source (4) inside the chamber, at least on cathode (5) and at least one anode (6).The anode and cathode are connected to the same current source (12) and a currentbreaker (15) is provided for breaking the cathode/anode current circuit. An independentclaim is included for a method of plasma treatment and or coating of workpieces.
申请人：HAUZER TECHNO-COATING B.V.
地址：Van Heemskerckweg 22 5928 LL Venlo NL
国籍：NL
代理机构：Stenger, Watzke & Ring
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